Illumination Mode: sanitize arguments

[demisjohn]

User tried to change Illumination mode (to the default of conventional), but conversion produce the following errors:

Reticle Data - Layer ID (NMESA) Image ID (NMESA5V1)
The 'lithography process ' (Conventional) is invalid.

for every Layer.

He may have had to guess at the text to input. Maybe as simple as needing ALL-CAPS in the exported TXT file. Check allowed values. Ultimate method is to BIN-->TXT convert jobs that are set to various Illum. modes, and see what the ASML outputs.

Either sanitize inputs to all-caps, or add allowed values to the docstring, or otherwise give instruction to get this working.
Also may need to sanitize the "SIGMA_INNER" and "SIGMA_OUTER" values.

Discovered by Ted Morin.

[fyodr]

Layer._parse_IllumMode should be sanitizing already...? It forces "Default" or "Conventional" or "Annular" in output. Apparently only "Default" is allowed by the conversion program? Have other users tried to control the illumination mode here?

This issue may require some debugging at the tool.

[demisjohn]

That’s right - I just guessed in the code, but it turns out we need to do the following:

• Generate a binary job at the tool, that uses Annular illum (and maybe another for “conventional”).
• Convert the binary job to text.
• inspect the resulting text file to see what the string is supposed to be, or if any additional fields showed up.
• modify export code accordingly.

I apologize I should have commented that code to state that it was untested.

[fyodr]

This feature would be very helpful to have implemented. I will begin debugging as soon as users can compile code on stepper3.